特点
- 靶材料电离和纳米颗粒生长的空心阴极设计
- 与基于磁控管的源相比,纳米颗粒的生长速率更高
- 易于互换的空心阴极靶
- 通过几个参数选项控制纳米粒子尺寸
- 经过充分调查和记录的参数研究
- 使用一系列靶材进行测试
- 纳米粒子获得净负电荷,这使得对优先点的电引导成为可能
我们的纳米颗粒团簇源是由该领域的专家设计的,他们在纳米颗粒生产方面具有丰富的经验。这些团簇源可用于多种应用。该纳米颗粒源使用标准管馈通和易于更换的靶阴极进行快速安装,适用于需要纳米颗粒源的高真空系统。HiPNano在高功率脉冲模式下运行,并针对我们的HiPSTER 1 HiPIMS装置进行了优化。
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