特点
- 稳健
- 稳定可靠放电过程——恒定电压,无不必要的振荡。
- 外部触发
- 外部触发,可通过主从配置进行控制——多个电源。
- 反应过程控制
- 可按要求实施反应性HiPIMS过程控制。该功能允许:
- 过渡模态中的稳定运行
- 保持化学计量成分的反应性气体流量具有较宽的工艺窗口
我们的HiPSTER Bipolar HiPIMS装置是一种新的HiPIMS技术。它们由该领域的专家设计,这些专家在等离子体工艺开发和薄膜沉积方面有着优秀的记录。这种设计可以实现稳健且可重复的HiPIMS工艺。
为了确保产品的卓越品质和优质性能,我们建议使用我们定制的HiPSTER直流装置和电缆。这些组件经过精心设计和严格测试,以确保在各种情况下都能提供稳定、可靠的性能。联系我们获取更多信息。
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